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Ball Screw & Linear Guide Solutions for Semiconductor and Precision Metrology

C3/C5 ground-grade screws, high-rigidity guides and ball splines for semiconductor packaging, AOI inspection and CMM - micron-level positioning for demanding precision equipment.

Industry Context & Accuracy Requirements

Semiconductor equipment (wafer handling, chip packaging, AOI inspection) and precision metrology instruments (CMM, optical vision measurers, laser interferometers) demand micron to sub-micron positioning accuracy, repeatability and smooth motion. Ordinary C7 rolled screws cannot meet these demands; C3/C5 ground screws paired with high-rigidity guides are required. Key targets: positioning accuracy ≤ ±5µm/300mm, repeatability ≤ ±2µm, noise ≤ 55dB, and low temperature rise (≤ 2°C over long runs).

Solution & Product Configuration

For semiconductor and precision metrology applications, Shiyi Automation recommends:

Ground ball screws - C3 (lead accuracy ±0.008mm/300mm) or C5 (±0.018mm/300mm), SFAR/SFVR series, preload P1 (medium) or P2 (heavy) to remove axial play and raise system rigidity;
High-rigidity linear guides - TRH-V high-assembly square blocks, accuracy class H or P, with suitable preload for straightness and load capacity;
Ball splines - for combined rotary + linear motion (e.g. wafer-handling robots), SLF/SLT series ball splines deliver high torque transmission accuracy and linear motion;
Dedicated supports - BK (fixed) / BF (supported) units; the fixed side uses matched angular-contact bearings for accurate axial location;
Cleanroom readiness - screws and guides with dust seals to reduce grease migration, meeting Class 1000/100 cleanroom requirements.

Typical Application

A Suzhou semiconductor inspection OEM built a chip AOI machine requiring XY positioning ±3µm, repeatability ±1.5µm and 500mm/s. Their previous C5 screws fluctuated ±5-8µm in practice. After switching to a MOSIONX C3 ground screw (SFAR1605, preload P2) with TRH15 P-class guides: positioning stabilised within ±2.5µm; repeatability ±1.2µm; noise reduced from 62dB to 53dB; ≤ 1.5°C temperature change over 8 hours.

Technical Support

We provide end-to-end support for precision equipment - screw preload adjustment guidance, rail parallelism checks, system accuracy verification and lubrication planning - with original-quality assurance and traceable batch management.

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